Applications and Metrology at Nanometer Scale 1

1 Nanometer Scale

The methodologies implemented for the elaboration and analysis of materials or objects on the nanometer scale are part of nanotechnologies. The fundamental research conducted at this scale, which is referred to as nanoscience, generates knowledge on the innovative properties associated with nanometer dimensions, as well as on the relevant methods of analysis. Nanotechnologies concern technologies used for the industrial manufacturing of devices carrying a commercial and societal value, while following the safety limits applicable to nano-objects manipulation and use. It is essentially multidisciplinary and relies on chemistry, physics, materials science, simulation, information and communication technologies, engineering science and many other disciplines. Mechatronics and robotics for terrestrial and spatial transportations and the technologies for connected objects are concerned by the developments in nanotechnologies. Working at the nanometer scale requires especially adapted metrology, as measurements of the properties of nanodevices often lead to relative values whose standard deviation is of the same order of magnitude as the measured value. Indeed, in most cases, to qualify the measured values, simulations should be conducted in parallel with the measuring process.

1.1. Introduction

Historically, the landmark of the foundation of nanotechnology is the lecture given by R. Feynman, recipient of Nobel Prize for Physics in 1965 for his contribution to ...