Applications and Metrology at Nanometer Scale 1

Introduction

The scientific study of measurement is known as metrology. Any measure is based on a universally accepted standard and any measuring process is prone to uncertainty. In engineering science, measurement concerns various types of parameters. Legal metrology is imposed by a regulatory framework that the manufactured product must respect. Technical or scientific metrology involves the methods used to measure the technical characteristics of the manufactured product. In engineering sciences, measurement concerns various types of parameters. In a more general context of a systemic approach, metrology should also be considered in connection with other indicators of the production system. These measures enable the follow-up and development of the processes implemented for ensuring and optimizing product quality or reducing failure so that it meets client expectations. The ability of a product to meet quality and reliability expectations can be addressed in the design stage, according to a RBDO (Reliability-Based Design Optimization) approach described in the “Reliability of Multiphysical Systems Set Book 2”, entitled Nanometer-scale Defect Detection Using Polarized Light. More generally, RBDO makes it possible to consider the uncertain parameters of manufacturing processes, measurement and operational conditions in order to optimize the manufacturing process, the design parameters and the overall quality of the product.

Reliability of Multiphysical Systems Set Book 2 focused ...