
448 Biosensors Based on Nanomaterials and Nanodevices
In addition to soft lithography approaches, other polymer fabrication techniques for
microuidic devices include hot embossing, micro-injection molding, laser ablation and
micromachining, and shrinky-dink microuidics.
18.3.2 Hot Embossing
Hot embossing of polymers is a very versatile replication method to transfer structures
from a master mold into the thermal polymer under high pressures and elevated tempera-
tures, and it is an alternative approach to traditional silicon processing and promising for
Soft lithography
PDMS mold
Silicon wafer
Silicon wafer
Master
PDMS
Peel off
PDMS ...