
194 Biosensors Based on Nanomaterials and Nanodevices
8.2 Fabrication Methods
In the previous section, photonics crystal theory and modeling of electromagnetic wave
interaction with photonic crystals were discussed. The critical dimensions obtained from
modeling are used for PhC fabrication. This section will describe top-down and bottom-
up fabrication techniques used to achieve periodic nanoscale lattice features.
8.2.1 Top-Down Fabrication Methods
The main techniques used to fabricate PhC structures in top-down fabrication are electron
beam lithography (EBL) for pattern generation, metal etch-mask deposition using electron
beam evaporation, and ...