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Biosensors Based on Nanomaterials and Nanodevices
book

Biosensors Based on Nanomaterials and Nanodevices

by Jun Li, Nianqiang Wu
December 2017
Intermediate to advanced content levelIntermediate to advanced
517 pages
21h 5m
English
CRC Press
Content preview from Biosensors Based on Nanomaterials and Nanodevices
194 Biosensors Based on Nanomaterials and Nanodevices
8.2 Fabrication Methods
In the previous section, photonics crystal theory and modeling of electromagnetic wave
interaction with photonic crystals were discussed. The critical dimensions obtained from
modeling are used for PhC fabrication. This section will describe top-down and bottom-
up fabrication techniques used to achieve periodic nanoscale lattice features.
8.2.1 Top-Down Fabrication Methods
The main techniques used to fabricate PhC structures in top-down fabrication are electron
beam lithography (EBL) for pattern generation, metal etch-mask deposition using electron
beam evaporation, and ...
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Publisher Resources

ISBN: 9781466551527