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Biosensors Based on Nanomaterials and Nanodevices
book

Biosensors Based on Nanomaterials and Nanodevices

by Jun Li, Nianqiang Wu
December 2017
Intermediate to advanced content levelIntermediate to advanced
517 pages
21h 5m
English
CRC Press
Content preview from Biosensors Based on Nanomaterials and Nanodevices
204 Biosensors Based on Nanomaterials and Nanodevices
Although conventional photolithography processing is high-throughput in production
facilities, its use for fabricating PhCs is limited by the feature sizes that can be achieved.
This disadvantage can be overcome by a novel technique called nanospherical-lens lithog-
raphy (Hou et al. 2005; Chang et al. 2012). On top of a photoresist layer, a monolayer of
polystyrene nanospheres is formed and when the surface is exposed to UV light, nano-
spheres act as lens and collimate the exposure energy. After the photoresist is developed,
the process of metal deposition, liftoff, and etching are performed ...
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Publisher Resources

ISBN: 9781466551527