Ceramic Thick Films for MEMS and Microdevices

Chapter 3. Thick-film deposition techniques

How to make thick films – the processing techniques used to create films

Chapter Outline

3.1 Introduction64

3.2 Creating Stable Inks65

3.2.1 Dispersion65

3.2.1.1 Electrostatic stabilization67

3.2.1.2 Steric stabilization68

3.2.1.3 Electrosteric stabilization69

3.2.2 Rheology70

3.3 Components of Inks73

3.3.1 Solvent73

3.3.2 Dispersants74

3.3.3 Binders and plasticizers75

3.4 Directed Coating Techniques75

3.4.1 Spray coating75

3.4.2 Mist coating76

3.4.3 Aerosol deposition76

3.5 Spreading Coating Techniques77

3.5.1 Screen printing77

3.5.2 Spin coating78

3.5.3 Doctor blade/tape casting79

3.6 Immersion Coating Techniques79

3.6.1 Dip coating79

3.6.2 Electrophoretic deposition80

3.6.3 Sedimentation81

3.6.4 Interfacial polymerization ...