Ceramic Thick Films for MEMS and Microdevices

Chapter 5. Patterning

How to go from a coating to a shape

Chapter Outline

5.1 Introduction114

5.2 Subtractive Patterning114

5.2.1 Masking115

5.2.2 Isotropic and anisotropic etching116

5.2.3 Physical etching117

5.2.3.1 Types of physical etching117

5.2.3.2 Precision machining118

5.2.3.3 Powder blasting118

5.2.4 Chemical etching120

5.2.4.1 Wet chemical etching120

5.2.4.2 Reactive and deep reactive ion etching123

5.2.4.3 Directed energy-based etching123

5.3 Additive Patterning124

5.3.1 Molding124

5.3.2 Placement based127

5.3.2.1 Types of placement-based additive patterning127

5.3.2.2 Inkjet printing128

5.3.2.3 Electrohydrodynamic atomization129

5.3.2.4 Challenges associated with droplet deposition techniques130

5.3.2.5 Screen printing132

5.3.2.6 Pad printing133

5.3.2.7 ...