Ceramic Thick Films for MEMS and Microdevices

Chapter 7. Recipes

Let’s get cooking!

Chapter Outline

7.1 Powders169

7.1.1 Lanthanum strontium manganate powder (sol–gel derived)169

7.1.1.1 Ingredients169

7.1.1.2 Instructions169

7.1.2 PZT powder (molten salt)170

7.1.2.1 Ingredients170

7.1.2.2 Instructions170

7.1.3 KNN powder (mixed oxide)170

7.1.3.1 Ingredients170

7.1.3.2 Instructions171

7.1.4 PZT powder (for spray pyrolysis)171

7.1.4.1 Ingredients171

7.1.4.2 Instructions171

7.2 Sols172

7.2.1 YSZ sol (propanol solvent)172

7.2.1.1 Ingredients172

7.2.1.2 Instructions172

7.2.2 YSZ sol (butanol solvent)172

7.2.2.1 Ingredients172

7.2.2.2 Instructions172

7.2.3 PZT sol (2ME solvent)172

7.2.3.1 Ingredients172

7.2.3.2 Instructions173

7.3 Films and Inks173

7.3.1 Screen-printing inks – Alumina ink173

7.3.1.1 Ingredients173 ...