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Characterization of Optical Materials by Gregory J. Exarhos

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2

Characterization of the Near-Surface Region Using Polarization-Sensitive Optical Techniques

GERALD E. JELLISON, JR.

Contents

2.1 Introduction

2.2 Ellipsometry

2.3 Microstructural Determinations from Ellipsometry Data

2.1   Introduction

Optical reflection techniques have long been recognized as premier characterization methods for the near-surface region of a material. Particularly, low-power optical measurements in the wavelength region from the near UV to the near IR (0.2–2.0 μm or 0.5–6.0 eV) offer several important advantages over competing diagnostic tools for surface and thin film analysis: optical probes are nondestructive, can be performed very rapidly, and can be carried out in any transparent ambient. Moreover, many polarization-sensitive ...

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