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Characterization of Optical Materials by Gregory J. Exarhos

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7

Surface Modification of Optical Materials

CARL J. McHARGUE

Contents

7.1 Introduction

7.2 Fundamental Processes

7.3 Ion Implantation of Some Optical Materials

7.1 Introduction

The use of energetic ion beams to modify the near-surface region of materials has been investigated extensively in recent years. It is an accepted industrial procedure for doping semiconducting materials and for increasing the wear, erosion, and oxidation resistance of metallic alloys. Use of this technique for modifying the structure and properties of the surfaces of structural ceramics and of optical materials is under active study.

The process consists of bombarding the surface of a material in a vacuum chamber with an electrostatically accelerated beam of ions. Because ...

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