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Characterization of Organic Thin Films by Abraham Ulman

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3

Spectroscopic Ellipsometry

ROBERT W. COLLINS, DAVID L. ALLARA, YEON-TAIK KIM, YIWEI LU, and JIANOU SHI

Contents

3.1   Introduction and Overview

3.2   Theory of Ellipsometry

3.3   Instrumentation

3.4   Determination of Optical Properties

3.5   Determination of Thin Film Structure

3.6   Future Prospects

3.1 Introduction and Overview

Ellipsometry is a technique used to determine the optical properties and physical structure of thin film and bulk materials.1 In this measurement, one determines the polarization change that an incident polarized, monochromatic beam of light incurs when it reflects from the specular surface of a material at a non-normal angle of incidence, θ. The power of ellipsometry derives from its ability to provide two parameters ...

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