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Chemical Sensors: Simulation and Modeling Volume 3: Solid-State Devices by Ghenadii Korotcenkov

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CHAPTER 8

MICROCANTILEVER-BASED CHEMICAL SENSORS

S. Martin

G. Louarn

1. INTRODUCTION

During the last 20 years, the spectacular advances in micromechanical systems, and more generally in micro-electro-mechanical systems (MEMS), have enabled the emergence of an innovative family of biological and chemical sensors. The functionality of such sensors involves the transduction of a mechanical energy, which comes from the deformations of the micromachined components. Among the different geometric shapes of these components, clamped-free beams, also called cantilevers, represent the simplest MEMS. Although cantilevers play a role as basic building blocks for complex MEMS devices, they are nowadays widely used as force sensor probes in atomic force microscopy ...

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