
Emerging Interconnect Technologies 169
(a) Silicon nanowire growth (b) TEM image of
SiNW
(c) Higher
magni-
fication
TEM
FIGURE 5.4
Vapor-liquid-solid growth of a silicon nanowire [31]: (a) Free Si atoms from
silane dissolve in the Au seed until reaching the Si:Au supersaturation. Then
Si is expelled as nanowire. (b) TEM image of SiNW synthesized at 500
◦
Cin
hexane at 200 bar. (c) TEM of a part of SiNW inside the square in (b) shows
high crystalline SiNWs.
since the laser pulses locally heat the substrate generating the particle for
the nanowire growth. It is also suitable for multicomponent nanowires, in-
cluding doped nanowires, and for nanowires with a high-quality ...