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Communication Architectures for Systems-on-Chip
book

Communication Architectures for Systems-on-Chip

by José L. Ayala
September 2018
Intermediate to advanced content levelIntermediate to advanced
449 pages
13h 16m
English
CRC Press
Content preview from Communication Architectures for Systems-on-Chip
Intra-/Inter-Chip Optical Communications 279
cently, N. Sherwood-Droz and coworkers have developed a new method based
on usual CMOS techniques for waveguide formation and integration [100].
SOI waveguides usually have a rectangular geometry and are built through
micro-lithography, or a negative-photo method, and then etching. The au-
thors of reference [100] proposed the use of thermal oxidation to generate the
necessary silica layer beneath the waveguide but protecting the original crys-
talline silicon with a three-sided cap of a very high oxidation temperature and
compatible material, Si
3
N
4
. This technique is similar to other known CMOS
techniques as LOCOS or SWAMI. The complete fabrication process, described
in Figure 7.25, starts with a crysta ...
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Publisher Resources

ISBN: 9781439841716