Chapter 3

Optically Stimulated Electron Emission

A Powerful Tool for Surface Cleanliness Monitoring

Mantosh K. Chawla    Photo Emission Tech., Inc., Camarillo, California, USA

Abstract

This chapter presents a thorough treatise of Optically Stimulated Electron Emission (OSEE), also known as photoelectric effect, including but not limited to the theory behind the technique, the factors affecting the technique and most common applications of the technique for the study, measurement, and evaluation of the changes in the surface state of almost any substrate. Specific examples of the vast array of applications are also presented covering all types of industries. This chapter is intended as a practical and a useful reference tool for anybody involved in ...

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