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Chapter 3

Dual-Fluid Spray Cleaning Technique for Particle Removal

James T. Snow, DNS Electronics, Carrollton, TX, USA

Masanobu Sato, Dainippon Screen Manufacturing Company, Hikone, Shiga, Japan

Takayoshi Tanaka, Dainippon Screen Manufacturing Company, Hikone, Shiga, Japan

Chapter Outline

1. Introduction

2. Particles and Adhesion Forces

3. Cleaning Process Window

3.1. Theoretical Predictions

3.2. Experimental Studies

4. Overview of Particle Removal Techniques

5. Dual-Fluid Spray Cleaning

5.1. System Description

5.2. Droplet Impact Energy

5.2.1. Impact on Solid Surface

5.2.2. Crown Formation

5.2.3. Impact on Liquid Film

6. Dual-Fluid Spray Development

7. Advanced Spray Development

7.1. Nozzle Development

7.2. Droplet Energy Density

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