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Diffuse Scattering and the Fundamental Properties of Materials by Rozaliya Barabash

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4

X-RAY STUDIES OF THERMALLY GROWN THIN VITREOUS SIO2 OVER SI(001)

M. Castro-Colin1

W. Donner2

S. C. Moss2

Z. Islam3

S. K. Sinha4

R. Nemanich5

H. T. Metzger6

T. Shülli6

P. Bösecke6

1. Department of Physics, University of Texas El Paso, El Paso, TX 79968, USA

2. Department of Physics, University of Houston, Houston, TX 77204, USA

3. Advanced Photon Source, Argonne National Laboratory, Argonne, IL, 60439, USA

4. Department of Physics, University of California San Diego, San Diego, CA, 92093, USA

5. Department of Physics, North Carolina State University, Raleigh, NC, 27695, USA

6. E. Synchrotron Radiation Facility, BP 220; 38043 Grenoble CEDEX 9, France

Abstract

We have explored the thin gate oxide formed when SiO2 is grown through thermal oxidation ...

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