Chapter 3

Advanced Characterization Techniques for Nanostructures

D. Brabazon1 and A. Raffer2

1Associate Dean for Research, Faculty of Engineering & Computing, Dublin City University, Glasnevin, Dublin 9, Ireland

2Centre for Research on Adaptive Nanostructures and Nanodevices, Trinity College Dublin, College Green, Dublin 2, Ireland

Abstract

This chapter presents many of the advanced techniques that can be used for visualizing and interacting with nanoscaled features. The techniques presented here fall into the three main categories of topology, internal structure and compositional investigation. Topological techniques presented here include field emission scanning electron microscopy (FESEM), scanning probe microscopy (SPM) and optical microscopy ...

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