1
Growth studies of heteroepitaxial oxide thin films using reflection high-energy electron diffraction (RHEED)
G. Koster, M. Huijben, A. Janssen, and G. Rijnders MESA+ Institute for Nanotechnology, University of Twente, Enschede, The Netherlands
Abstract
In this chapter, reflection high-energy electron diffraction (RHEED) in combination with pulsed laser deposition (PLD) is described. Both the use of RHEED as a real-time rate-monitoring technique and methods to study nucleation and growth during PLD are discussed. After a brief introduction of RHEED, a case is made for the step density model to describe the intensity variations encountered during deposition. An overview of these intensity variations, the intensity response during an RHEED experiment ...
Get Epitaxial Growth of Complex Metal Oxides now with the O’Reilly learning platform.
O’Reilly members experience books, live events, courses curated by job role, and more from O’Reilly and nearly 200 top publishers.
