10.5.2 Chemical Vapor Deposition

The mechanisms by which CVD occurs are very similar to those of heterogeneous catalysis discussed earlier in this chapter. The reactant(s) adsorbs on the surface and then reacts on the surface to form a new surface. This process may be followed by a desorption step, depending on the particular reaction.

Ge used in Solar Cells

The growth of a germanium epitaxial film as an interlayer between a gallium arsenide layer and a silicon layer has received attention in the microelectronics industry.19 Epitaxial germanium is also an important material in the fabrication of tandem solar cells. The growth of germanium films can be accomplished by CVD. A proposed mechanism is

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