Fundamental Principles of Engineering Nanometrology, 2nd Edition

List of Tables

Table 2.1	The SI Base Units	10
Table 3.1	Sources of Seismic Vibration and Corresponding Frequencies	55
Table 3.2	Possible Sources of Very Low-Frequency Vibration	56
Table 4.1	Gauge Block Classes According to ISO 3650	67
Table 4.2	The Quality Factor and Coherence Length of Some Light Sources	72
Table 4.3	Effect of Parameters on Refractive Index	87
Table 6.1	Minimum Distance Between Features for Different Objectives	149
Table 6.2	Types of Unidimensional (Profile) Material Measures	180
Table 6.3	Type of Bidimensional (Areal) Material Measures	181
Table 7.1	Overview of Guidance Deviations, Transfer Artefacts to Be Used and Calibration Measurements	217
Table 7.2	Examples of Surface Forces Commonly Encountered in AFM Measurement ...