University of Seville
University of Seville
National Microelectronics Center
14.2 Modeling and Scaling Laws
Scale in Size • Mechanical Properties • Modeling
Semiconductor Substrates: Silicon and Other Compound Materials • Silicon Oxide and Silicon Nitride • Insulating Substrates: Quartz, Glass, and Sapphire • Metals • Ceramics • Polymers
Material Deposition Techniques for MEMS • Classification of Deposition Techniques • Physical Deposition Techniques • Physical Vapor Deposition • Sputtering • Evaporation • Pulsed Laser Deposition • Spin Casting • Chemical Deposition and Growth Techniques • Thermal Oxidation • Chemical ...
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