
456 Fundamentals of Machining Processes
The main drawbacks are related to the lack of machining accuracy caused
by the side-machining effect that reduces the precision of copying the tool
shape onto the workpiece. The ow pattern and the electrolyte temperature
also affect the machining accuracy.
Additionally, thin-lm jet etching uses a ne jet of electrolyte without
advancing the jet toward the workpiece for generating patterns, as shown in
Figure 14.14. The rate and precision of jet EMM is shown in Table 14.5.
14.4.3 Combined Micromachining Processes
14.4.3.1 Chemical-Assisted Mechanical Polishing
Chemical-assisted mechanical polishing (CMP) ...