
63
Gallium Nitride
Transistors on
Large-Diameter
Si(111) Substrate
Subramaniam Arulkumaran and Geok Ing Ng
3.1 OVERVIEW OF GaN-ON-Si TECHNOLOGY
Nitride semiconductors are quickly transforming our world by enabling new solid-
state lighting, highly efcient ampliers for wireless communications, advanced
power electronics with ultra low losses, and a large array of new high-performance
devices. Today, the need for high-power and high-frequency transistors are still
increasing steadily, commensurate with the huge demand for wireless telecommuni-
cations. Higher power, higher frequency bandwidths, better linearity, and improved
efciency are still d ...