146 Gallium Nitride (GaN): Physics, Devices, and Technology
of 4–6 in., which are required for today’s volume production of large-area MMICs.
Semi-insulating AlN is another material that is promising [10] as it is highly insu-
lating and used as a passive material in many applications based on polycrystalline
materials. However, crystalline AlN substrates with diameters greater than 2 in. are
not available.
5.1.2 trAnsMission Lines And PAssive PArAMeters
For use in an IC, a set of passive RF components is typically used. Such components
and their related functions are typically standardized in passive libraries or process
design kits (PDK). This includes airbridges, power dividers [11], couplers [12], cross-
ings, viaholes, and pad connectors. ...