Over the years, many optical principles that have the potential for metrological applications have been found, and many related techniques and devices have been invented. On the basis of these principles and techniques, numerous interesting applications have been reported in academic communities. In addition, a number of optical equipment and systems have already been commercialized.
So we may ask, “What are the features of optical metrology?” First of all, that it is a “noncontact approach” in metrological applications should be cited. This feature causes neither deformation nor damage to the specimen due to the measuring force. Also, flexibility in setting up measuring systems is also brought by this noncontact ...
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