Handbook of Optical Metrology, 2nd Edition

11	Diffraction
Toru Yoshizawa

CONTENTS

11.1  Introduction

11.2  Fundamentals of Diffraction

11.3  Application of Diffractographic Method

11.4  Application of Grating Diffraction Method

11.5  Conclusion

References

11.1    INTRODUCTION

The diffraction phenomenon in which light sneaks around to the back of the shading screen is one of the typical properties inherent to light, and its physical explanation is described well in famous reference books on optics [1,2,3]. Diffraction is well known and we can easily observe this phenomenon by using a coherent beam from a laser. However, it is not easy to understand the theoretical description of diffraction completely. Here, we focus on diffraction in the Fraunhofer region, because it is much easier ...