Handbook of Optical Metrology, 2nd Edition

15	Length and Size
René Schödel

CONTENTS

15.1    Introduction

15.2    Basic Principle of Length Measurements by Interferometry

15.3    Basic Types of Length Measuring Interferometers

15.3.1    Twyman–Green Interferometers

15.3.2    Fizeau Interferometers

15.3.3    Fringe-Counting Interferometers

15.4    Requirements for Accurate Length Measurements by Interferometry

15.4.1    Light Sources

15.4.2    Generation and Alignment of Plane Waves

15.4.3    Determination of the Refractive Index of Air

15.4.4    Importance of Temperature Measurements

15.5    Interferometry on Prismatic Bodies

15.5.1    Imaging of the Body onto a Pixel Array

15.5.2    Interferogram Analysis

15.5.3    Length Evaluation

15.5.4    Examples of Precise Length Measurement ...