Handbook of Optical Metrology, 2nd Edition

31	Interference Microscopy for Surface Structure Analysis
Peter J. de Groot

CONTENTS

31.1  Overview

31.1.1  Introduction

31.1.2  Historical Perspective

31.1.3  Interference Microscopy

31.2  Principles

31.2.1  Interference Signals and Patterns

31.2.2  Phase Shifting Interferometry

31.2.3  Coherence Scanning Interferometry

31.3  Instrument Design for Interference Microscopy

31.3.1  Light Source and Detection

31.3.2  Optical System

31.3.3  System Configurations

31.3.4  Postprocessing

31.4  Signal Modeling

31.4.1  Modeling of Interference Microscopy Fringe Patterns

31.4.2  The Obliquity Effect

31.4.3  Transparent Films

31.4.4  Model-Based Analysis

31.5  Performance

31.5.1  Good Practice and Instrument Evaluation

31.5.2  Surface Topography ...