O'Reilly logo

Handbook of Silicon Based MEMS Materials and Technologies by Teruaki Motooka, Ari Lehto, Markku Tilli, Veikko Lindroos

Stay ahead with the world's most comprehensive technology and business learning platform.

With Safari, you learn the way you learn best. Get unlimited access to videos, live online training, learning paths, books, tutorials, and more.

Start Free Trial

No credit card required

Future of MEMS Technologies

Is Silicon Enough?

Silicon is a nearly perfect mechanical material and enables the micromachining of very precise structures. There are also some limitations related to the cost and the ultimate material properties. In microfluidics and optical applications, e.g., in diffractive optics, the use of polymer substrates and structures is much more inexpensive in large volumes. The sophisticated technologies for replicating the microstructures into polymer surfaces have been developed [88–91]. The basic idea of the process is to fabricate the primary mechanical structure into the surface of the silicon wafer, deposit a metal film on top of the silicon structure and electroplate a thick metal layer (for example, a nickel ...

With Safari, you learn the way you learn best. Get unlimited access to videos, live online training, learning paths, books, interactive tutorials, and more.

Start Free Trial

No credit card required