References
1. Sze S.M., Semiconductor Devices, Physics and Technology 1985 Wiley Singapore
2. Shimura F., Semiconductor Silicon Crystal Technology 1989 Academic Press San Diego
3. Glunz S.W., Rein S., Lee J.Y., Warta W., Minority carrier lifetime degradation in boron-doped Czochralski silicon J. Appl. Phys. 90 5 2001, 2397-2404
4. Sumino K., Yonenaga I., Oxygen effect on mechanical properties F. Shimura, Oxygen in Silicon, Semiconductors and Semimetals vol. 42 1994 Academic Press USA, 449-511
5. Yonenaga I., Dislocation behavior in heavily impurity doped Si Scripta Mater. 45 11 2001, 1267-1272
6. Borghesi A., Pivac B., Sassella A., Stella A., Oxygen precipitation in silicon J. Appl. Phys. 77 9 1995, 4169-4244
7. Takeno H., Otogawa ...
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