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Handbook of Silicon Based MEMS Materials and Technologies by Teruaki Motooka, Ari Lehto, Markku Tilli, Veikko Lindroos

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References

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5. Yonenaga I., Dislocation behavior in heavily impurity doped Si Scripta Mater. 45 11 2001, 1267-1272

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7. Takeno H., Otogawa ...

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