References

1. International SEMI Standards, Semiconductor Equipment and Materials International, November 2007, www.SEMI.org.

2. SEMI M1-0707, Specifications for Polished Monocrystalline Silicon Wafers, Semiconductor Equipment and Materials International 2007, www.semi.org.

3. http://www.itrs.net/

4. H.J. Möller, Basic mechanisms and models of multi-wire sawing Adv. Eng. Mater. 6 2004, 501-513

5. M12-0706 Specification for Serial Alphanumeric Marking of the Front Surface of Wafers, Semiconductor Equipment and Materials International 2007, www.semi.org.

6. M13-0706 Specification for Alphanumeric Marking of Silicon Wafers, Semiconductor Equipment andMaterials International 2007, www.semi.org.

7. Z.J. Pei, G.R. Fisher, M. Bhagavat, S. Kassir ...

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