References
1. International SEMI Standards, Semiconductor Equipment and Materials International, November 2007, www.SEMI.org.
2. SEMI M1-0707, Specifications for Polished Monocrystalline Silicon Wafers, Semiconductor Equipment and Materials International 2007, www.semi.org.
4. H.J. Möller, Basic mechanisms and models of multi-wire sawing Adv. Eng. Mater. 6 2004, 501-513
5. M12-0706 Specification for Serial Alphanumeric Marking of the Front Surface of Wafers, Semiconductor Equipment and Materials International 2007, www.semi.org.
6. M13-0706 Specification for Alphanumeric Marking of Silicon Wafers, Semiconductor Equipment andMaterials International 2007, www.semi.org.
7. Z.J. Pei, G.R. Fisher, M. Bhagavat, S. Kassir ...
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