10.2. Requirements for Modeling Micromachining
10.2.1. Database
The simulation of the different micromachining processes is possible only if a comprehensive database of different material properties and process parameters is available. As an example, the purely vertical deposition of a desired thickness of a material layer on a flat substrate is a simple computational mask, requiring only the addition of a corresponding number of rows to a computational array. However, assigning realistic electromechanical properties to the layer—also computationally straightforward—can only be done if a database can be used. Companies focused on the modeling of MEMS, such as Coventor and IntelliSense [7, 8], need to provide extensive micromachining databases ...
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