References

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3. R.M. Harris, F. Maseeh, S.D. Senturia, Automatic generation of a 3-D solid model of a microfabricated structure, in: Proc. IEEE Solid-State Sensor and Actuator Workshop, June 1990, pp. 36–41.

4. S.D. Senturia, R.M. Harris, B.P. Johnson, S. Kim, K. Nabors, M.A. Shulman, J.K. White, A computer-aided design system for microelectromechanical systems (MEMCAD) J. Microelectromech. Syst. 1 1992, 3-13 ...

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