13.3. Numerical Modeling Methods for Optical MEMS
The design of optical MEMS mainly relies on numerical modeling methods. Some specific modeling tasks can be carried out with analytical modeling methods, but in most cases one first needs to make some approximations and then numerically solve the simplified problem. Due to the high frequency and small wavelength of light, accurate optical modeling is significantly more complicated than, for example, electrical, mechanical or thermal modeling of equally large devices. Thus, a proper method for a given optical modeling task must be carefully selected by taking into account the area or volume to be analyzed, the size of structures that influence light propagation, the properties and homogeneity ...
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