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Handbook of Silicon Based MEMS Materials and Technologies by Teruaki Motooka, Ari Lehto, Markku Tilli, Veikko Lindroos

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14.3.1. Compressible Squeeze-Films

The compressibility is an out-of-plane phenomenon, similar to the flow-through perforations in Section 14.2.4. This explains the similarity between Eq. 14.49 and the following linearized (modified) Reynolds equation for compressible flow:(14.55)where p0 is the static pressure.

The ratio of the compressible force and the viscous damping force is an important relation, which is usable in determining if the compressibility effect (frequency dependency) is needed in calculating the damping force. There are two similar measures for the compressibility effect: (a) the cutoff frequency fc, the frequency when the real ...

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