21.2. Measuring Bulk Microdefects
Oxygen precipitates and related defects in the silicon bulk are often referred to as bulk microdefects (BMDs). The measurement of these defects can be quite complicated as the defect sizes are often in the nanometer scale. The most common and by far the simplest method used today for measuring the BMD density is called preferential etching. More advanced methods include IR optical systems (e.g., SIRM and LST, which can reveal the size of the defects besides their density). This subchapter lists the methods that can measure the common properties of BMDs.
21.2.1. Preferential Defect Etching
The preferential etching of defects is based on the use of a special etching solution, which has a higher etch rate around ...
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