25.6.3. Pressure Sensors

MEMS pressure sensors are widely employed in the automotive industry and other industrial sectors as well as in various kinds of medical instruments. Typical automotive applications include manifold absolute pressure (MAP) and barometric air pressure (BAP) measurement in engine control units. Other applications are tire pressure, fuel tank, or airbag monitoring systems [54, 55]. Micromechanical pressure sensors are also increasingly used in consumer electronics, as, for instance, in altimeters inside mobile phones or in climate-control and navigation systems. All applications demand small-size, low-cost, and high-accuracy pressure sensors.

In MEMS pressure sensors, the key element is a diaphragm containing piezoresistors ...

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