Handbook of Silicon Based MEMS Materials and Technologies

27.6. Applications of BMGs in MEMS

Based on the above-described progress in fundamental studies, the bulk glassy alloys have already been used as practical engineering materials. The Zr⁵⁵Al¹⁰Cu³⁰Ni⁵ and Zr⁵⁰Ti⁵Al¹⁰Ni¹⁰Cu²⁵ BMGs were commercialized in 1998 as striking-plane materials for golf clubs, in drivers and iron putters [31, 39, 79]. Unique mechanical properties of BMGs were also used to develop a highly sensitive Coriolis mass-flow meter using sensing pipes made from Ti–Zr–Ni–Cu–Sn BMG [39]. The Ti-based glassy alloy pipes can produce greater elastic deformation from forced vibrations than the conventional SUS316 stainless steel pipes. The sensitivity of Ti-based BMG sensor was confirmed to be as much as 28.5 times higher than the conventional ...