Handbook of Silicon Based MEMS Materials and Technologies

29.3. Silicon BioMEMS for Biological Detection

29.3.1. Case Study: Bacteria Detection Using Microarrays

Many types of biosensors have been proposed for detection of biological molecules [59–62]. As an alternative to commercial high density microarrays, which are complex to use and can cause quenching of the used fluorophors through contaminants, interdigitated (IDA) gold nano-electrodes, with thiol-modified oligonucleotides immobilized on the IDA, were used to identify and quantify pathogens [60]. The fluidic chips, each 9 mm by 10 mm and carrying 16 electrode positions of 500 μm diameter each, were fabricated on standard 6 in. silicon wafers. The IDA gold array electrodes consist of two interlocking comb-like structures with 204 fingers, each ...