O'Reilly logo

Hot Embossing by Matthias Worgull

Stay ahead with the world's most comprehensive technology and business learning platform.

With Safari, you learn the way you learn best. Get unlimited access to videos, live online training, learning paths, books, tutorials, and more.

Start Free Trial

No credit card required

References

1 Battenfeld. http://www.battenfeld-imt.com, 2008.

2 M.D. Austin, H. Ge, W. Wu, M. Li, Z. Yu, D. Wasserman, S.A. Lyon, S.Y. Chou, Fabrication of 5 nm linewidth and 14 nm pitch features by nanoimprint lithography Applied Physics Letters 84 26 2004, 5299-5302

3 H. Becker, C. Gärtner, Polymer microfabrication technologies for microfluidic systems Anal. Bioanal. Chem. 390 2008, 89-111

4 M. Bender, M. Otto, B. Hadam, B. Vratzov, B. Spangenberg, H. Kurz, Fabrication of nanostructures using an UV-based imprint technique Microelectronic Engineering 53 2000, 233-236

5 S.Y. Chou, P.R. Krauss, P.J. Renstrom, Imprint of sub-25 nm vias and trenches in polymers Appl. Phys. Lett. 67 1995, 3114-3116

6 S.Y. Chou, P.R. Krauss

With Safari, you learn the way you learn best. Get unlimited access to videos, live online training, learning paths, books, interactive tutorials, and more.

Start Free Trial

No credit card required