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Hot Embossing by Matthias Worgull

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6.4.2. The Process Step of Molding

The flow behavior during molding is one the most investigated parts of hot embossing or nanoimprinting. Cross [6] surveyed the developments in nanoimprinting with the focus on the flow behavior and the filling of cavities. The filling of microcavities and the theory for flow in the micro and nanoscopic range is a basic research topic because of the differences during macroscopic and microscopic flow behavior. Systematic experiments regarding the flow behavior were investigated by Scheer and Schulz [33] and Heyderman et al. [14]. Juang et al. [17,18] investigate theoretically and by experimentation the flow behavior during filling microcavities under isothermal and non-isothermal conditions and the effects ...

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