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Hot Embossing by Matthias Worgull

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9.1. Direct Structuring Methods

Not every design requires the quality of lithographic processes for mold fabrication. Direct structuring methods are an alternative technique. These methods have a limitation in size of structured areas of some lithographic processes. Therefore, direct structuring processes are well suited for large microstructured areas. Structure sizes in the range of 30 μm can be achieved, but the surface quality does not achieve the quality of lithographic processes. With selected methods and selected machines it is possible to achieve optical qualities of surfaces, but the requirements and therefore the complexity of the whole process increase significantly.

9.1.1. Mechanical Micro Machining

Mechanical micro machining ...

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