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Hot Embossing by Matthias Worgull

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9.2. Lithographic Structuring Methods

Lithographic structuring methods include the processes of UV lithography, X-ray lithography, and E-beam lithography. The resolution that can be achieved is a function of the wave length of the electromagnetic waves. Therefore, each of these lithographic structuring methods is characterized by it is own qualities and is suited for different kinds of structures, lateral dimensions, and aspect ratios. Independent of the lithographic process, the post-process step of electroforming is required to obtain a mold insert of metal.

9.2.1. Electroforming of Mold Inserts

Electroforming allows the fabrication of microstructured nickel mold inserts from materials typically not appropriate for use as mold inserts. ...

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