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Hot Embossing by Matthias Worgull

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10.2. Micro-optical Devices

Micro-optical devices are one of the main applications in microsystem technology. The devices that can be replicated by hot embossing are manifold, beginning with micro-optical components like lenses, mirrors, optical benches, or waveguides, up to microsystems like micro spectrometers, DFB-laser systems, optical switches, fiber connectors, photonic crystals, or anti-reflection films [41,46]. Because of the requirements regarding structure sizes, surface quality, and accuracy of lateral distances, the mold inserts for hot embossing are typically fabricated by lithographic processes. In the following section the replication of micro-optical components is discussed regarding the aspects of replication in polymers. It ...

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