10.2.6. Micro Spectrometer

At the Institute for Micro System Technologies at the research center of Karlsruhe a micro spectrometer was developed by the use of LIGA technology [28,37]. By this technology all components of the spectrometer—like the connection component to optical waveguides, optical gap, grating, and reflecting mirrors—can by integrated and adjusted in a precise arrangement on a mold insert. This allows the reduction of fabrication and assembling steps and will eventually reduce the cost of high-precision micro spectrometers. These kinds of spectrometers can be used to analyze different ranges of wavelengths, beginning from the UV, to the visible range, up to the infrared range of wavelength. The UV- and visible-range spectrometer ...

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