Information Technology and Computer Application Engineering – Liu, Sung & Yao (Eds)
© 2014 Taylor & Francis Group, London, ISBN 978-1-138-00079-7
Design and implementation of the control system to ovenware furnace
based on MOCVD equipment
Cong Li, Chunmei Li & Yaning Zhang
School of Electrical Engineering, University of Jinan, China
ABSTRACT: This paper put forward a design scheme of the control system for ovenware furnace based on
MOCVD equipment. The control system composed field bus control system (FCS) based on industrial computer,
PLC, intelligent PID instrument, digital mass flow meter etc. The whole system realize the controlling unit
including temperature control of the furnace, tracking control of gas flow, cooling control, control system ...