Index
A
ablative process, 26–32
experimental parameters, 29–32
experimental etching results for planar polycarbonate and polished steel, 32
long pulse and ultra-short pulse effects, 31
mechanisms, 28–9
scheme, 26–7
backward, forward ablation and selective film etching, 27
absorption coeffl cient, 18
acrylate, 203
AllnGaN laser, 181
avalanche ionisation, 309–10
B
beam shaping, 274
benzocyclobutene (BCB) polymers
as planarisation material for semiconductor photonic devices fabrication, 271–2
properties for photonic applications, 270–1
BCB polymers curing characteristics, 271
curing behaviour of BCB for an oven-based method, 271
summary of properties of BCB polymers, 270
bolometer, ...
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