Skip to Main Content
Laser-Induced Damage in Optical Materials
book

Laser-Induced Damage in Optical Materials

by Detlev Ristau
December 2014
Intermediate to advanced content levelIntermediate to advanced
551 pages
23h 57m
English
CRC Press
Content preview from Laser-Induced Damage in Optical Materials
475
Lithography in the Deep Ultraviolet and Extreme Ultraviolet
Chapter 17
17. Lithography in the
Deep Ultraviolet and
Extreme Ultraviolet
Klaus R. Mann
17.1 Introduction: Microlithography
In the semiconductor industry, optical projection lithography is employed for the
production of microchips, using ultraviolet radiation for structured exposure of photore-
sists on silicon wafers. is key process represents the basis of computer and information
technologies and is therefore also of fundamental importance for our modern society. e
development of the structure sizes in computer chips is described since 1965 by Moore’s
law, stating that the number ...
Become an O’Reilly member and get unlimited access to this title plus top books and audiobooks from O’Reilly and nearly 200 top publishers, thousands of courses curated by job role, 150+ live events each month,
and much more.
Start your free trial

You might also like

Specialty Optical Fibers Handbook

Specialty Optical Fibers Handbook

Alexis Mendez, T. F. Morse
Integrated Nanophotonic Devices, 2nd Edition

Integrated Nanophotonic Devices, 2nd Edition

Zeev Zalevsky, Ibrahim Abdulhalim
Fiber Lasers

Fiber Lasers

Johan Meyer, Justice Sompo, Suné von Solms

Publisher Resources

ISBN: 9781439872161