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Lithography in the Deep Ultraviolet and Extreme Ultraviolet
Chapter 17
17. Lithography in the
Deep Ultraviolet and
Extreme Ultraviolet
Klaus R. Mann
17.1 Introduction: Microlithography
In the semiconductor industry, optical projection lithography is employed for the
production of microchips, using ultraviolet radiation for structured exposure of photore-
sists on silicon wafers. is key process represents the basis of computer and information
technologies and is therefore also of fundamental importance for our modern society. e
development of the structure sizes in computer chips is described since 1965 by Moore’s
law, stating that the number ...