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Laser-Induced Damage in Optical Materials
book

Laser-Induced Damage in Optical Materials

by Detlev Ristau
December 2014
Intermediate to advanced content levelIntermediate to advanced
551 pages
23h 57m
English
CRC Press
Content preview from Laser-Induced Damage in Optical Materials
495Lithography in the Deep Ultraviolet and Extreme Ultraviolet
Chapter 17
However, the damage morphology is rather similar to the nanosecond case as depicted in
Figure 17.23, indicating surface structures with depths of ~60nm. According to Khorsand
et al. (2010), compaction of the multilayer mirror due to intermixing of molybdenum
and silicon is involved in the damaging process.
17.3.3 Damage Testing of Other EUV Optical Materials
e LPP source with the EUV Schwarzschild objective could also be employed to per-
form rst nanosecond damage experiments on other optical materials relevant for future
Fluence [mJ/cm
2
]
Damage
threshold
10
–50
0
50
Damaged area ...
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Publisher Resources

ISBN: 9781439872161